Granted Patent
Utility
US 5,081,390 · App. 07/565,713
Method of operating a scanning probe microscope to improve drift characteristics
Inventor:
Virgil B. Elings
Patented Case
View Patent ↗
Granted: Jan 14, 1992
Filed: Aug 13, 1990
Inventor
Virgil B. Elings
Assignee (at issue)
Digital Instruments, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.