Granted Patent
Utility
US 5,082,518 · App. 07/604,510
Sparger plate for ozone gas diffusion
Inventor:
James S. Molinaro
Patented Case
View Patent ↗
Granted: Jan 21, 1992
Filed: Oct 29, 1990
Inventor
James S. Molinaro
Assignee (at issue)
Submicron Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.