Granted Patent
Utility
US 5,084,416 · App. 07/481,561
Method of forming a low resistance contact by forming a contact hole within a recess
Inventors:
Hideto Ozaki, Shuichi Mayumi, Seiji Ueda
Patented Case
View Patent ↗
Granted: Jan 28, 1992
Filed: Feb 20, 1990
Inventors
Hideto Ozaki
Shuichi Mayumi
Seiji Ueda
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.