Granted Patent
Utility
US 5,084,622 · App. 07/564,221
Correction system for a charged-particle beam apparatus
Inventor:
Harald Rose
Patented Case
View Patent ↗
Granted: Jan 28, 1992
Filed: Aug 7, 1990
Inventor
Harald Rose
Assignee (at issue)
U.S. Philips Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.