Granted Patent
Utility
US 5,094,885 · App. 07/596,512
Differential pressure CVD chuck
Inventor:
Steven C. Selbrede
Patented Case
View Patent ↗
Granted: Mar 10, 1992
Filed: Oct 12, 1990
Inventor
Steven C. Selbrede
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.