Granted Patent
Utility
US 5,096,534 · App. 07/329,778
Method for improving the reactant gas flow in a reaction chamber
Inventor:
Albert E. Ozias
Patented Case
View Patent ↗
Granted: Mar 17, 1992
Filed: Mar 28, 1989
Inventor
Albert E. Ozias
Assignee (at issue)
Epsilon Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.