IP Library Granted Patent US 5,100,503
Granted Patent Utility
US 5,100,503 · App. 07/637,903

Silica-based anti-reflective planarizing layer

Inventors: Derryl D. J. Allman, Brian R. Lee
Patented Case View Patent ↗
Granted: Mar 31, 1992 Filed: Jan 7, 1991
Inventors
Derryl D. J. Allman
Brian R. Lee
Assignee (at issue)
NCR Corporation

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Quick Facts
Patent No.
US 5,100,503
App. No.
07/637,903
Filed
1991-01-07
Granted
1992-03-31
Kind
A