Granted Patent
Utility
US 5,103,102 · App. 07/315,732
Localized vacuum apparatus and method
Inventors:
Nicholas Economou, David Edwards, Nicholas Guarino
Patented Case
View Patent ↗
Granted: Apr 7, 1992
Filed: Feb 24, 1989
Inventors
Nicholas Economou
David Edwards
Nicholas Guarino
Assignee (at issue)
Micron Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.