Granted Patent
Utility
US 5,103,183 · App. 07/471,152
Method of profiling compensator concentration in semiconductors
Inventors:
Robert Klein, Bradley Leonard Halleck
Patented Case
View Patent ↗
Granted: Apr 7, 1992
Filed: Jan 26, 1990
Inventors
Robert Klein
Bradley Leonard Halleck
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.