IP Library Granted Patent US 5,103,288
Granted Patent Utility
US 5,103,288 · App. 07/677,619

Semiconductor device having multilayered wiring structure with a small parasitic capacitance

Inventors: Mitsuru Sakamoto, Kuniyuki Hamano
Patented Case View Patent ↗
Granted: Apr 7, 1992 Filed: Mar 27, 1991
Inventors
Mitsuru Sakamoto
Kuniyuki Hamano
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,103,288
App. No.
07/677,619
Filed
1991-03-27
Granted
1992-04-07
Kind
A