IP Library Granted Patent US 5,111,053
Granted Patent Utility
US 5,111,053 · App. 07/656,848

Controlling a liquid metal ion source by analog feedback and digital CPU control

Inventor: Katsumi Suzuki
Patented Case View Patent ↗
Granted: May 5, 1992 Filed: Feb 19, 1991
Inventor
Katsumi Suzuki
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 5,111,053
App. No.
07/656,848
Filed
1991-02-19
Granted
1992-05-05
Kind
A