IP Library › Granted Patent US 5,114,494
Granted Patent Utility
US 5,114,494 · App. 07/517,997

Mask washing system and method

Inventor: Thomas M. Remec
Patented Case View Patent ↗
Granted: May 19, 1992 Filed: May 2, 1990
Inventor
Thomas M. Remec
Assignee (at issue)
Zenith Electronics LLC

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Quick Facts
Patent No.
US 5,114,494
App. No.
07/517,997
Filed
1990-05-02
Granted
1992-05-19
Kind
A