IP Library › Granted Patent US 5,114,874
Granted Patent Utility
US 5,114,874 · App. 07/529,982

Method of making a sub-micron NMOS, PMOS and CMOS devices with methods for forming sub-micron contacts

Inventor: Frank Z. Custode
Patented Case View Patent ↗
Granted: May 19, 1992 Filed: May 30, 1990
Inventor
Frank Z. Custode
Assignee (at issue)
Rockwell International Corporation

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Quick Facts
Patent No.
US 5,114,874
App. No.
07/529,982
Filed
1990-05-30
Granted
1992-05-19
Kind
A