Granted Patent
Utility
US 5,116,457 · App. 07/753,607
Semiconductor transducer or actuator utilizing corrugated supports
Inventor:
John H. Jerman
Patented Case
View Patent ↗
Granted: May 26, 1992
Filed: Aug 30, 1991
Inventor
John H. Jerman
Assignee (at issue)
IC Sensors, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.