IP Library › Granted Patent US 5,117,769
Granted Patent Utility
US 5,117,769 · App. 07/539,062

Drive shaft apparatus for a susceptor

Inventors: Wiebe B. deBoer, Albert E. Ozias
Patented Case View Patent ↗
Granted: Jun 2, 1992 Filed: Jun 15, 1990
Inventors
Wiebe B. deBoer
Albert E. Ozias
Assignee (at issue)
Epsilon Technology Corporation

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Quick Facts
Patent No.
US 5,117,769
App. No.
07/539,062
Filed
1990-06-15
Granted
1992-06-02
Kind
A