IP Library Granted Patent US 5,120,589
Granted Patent Utility
US 5,120,589 · App. 07/614,116

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Inventors: Masaki Morikawa, Naoyuki Hosoda, Naoki Uchiyama
Patented Case View Patent ↗
Granted: Jun 9, 1992 Filed: Nov 16, 1990
Inventors
Masaki Morikawa
Naoyuki Hosoda
Naoki Uchiyama
Assignee (at issue)
MITSUBISHI MATERIALS CORPORATION

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Quick Facts
Patent No.
US 5,120,589
App. No.
07/614,116
Filed
1990-11-16
Granted
1992-06-09
Kind
A