IP Library Granted Patent US 5,126,318
Granted Patent Utility
US 5,126,318 · App. 07/668,579

Sputtering method for forming superconductive films using water vapor addition

Inventors: John R. Gavaler, Timothy T. Braggins
Patented Case View Patent ↗
Granted: Jun 30, 1992 Filed: Mar 13, 1991
Inventors
John R. Gavaler
Timothy T. Braggins
Assignee (at issue)
Westinghouse Electric Company LLC

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Quick Facts
Patent No.
US 5,126,318
App. No.
07/668,579
Filed
1991-03-13
Granted
1992-06-30
Kind
A