IP Library Granted Patent US 5,126,565
Granted Patent Utility
US 5,126,565 · App. 07/741,030

Energy filter for charged particle beam apparatus

Inventor: Harald Rose
Patented Case View Patent ↗
Granted: Jun 30, 1992 Filed: Aug 6, 1991
Inventor
Harald Rose
Assignee (at issue)
U.S. Philips Corporation

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Quick Facts
Patent No.
US 5,126,565
App. No.
07/741,030
Filed
1991-08-06
Granted
1992-06-30
Kind
A