Granted Patent
Utility
US 5,128,283 · App. 07/363,124
Method of forming mask alignment marks
Inventor:
Koukiti Tanaka
Patented Case
View Patent ↗
Granted: Jul 7, 1992
Filed: Jun 8, 1989
Inventor
Koukiti Tanaka
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.