Granted Patent
Utility
US 5,129,724 · App. 07/647,555
Apparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sample
Inventors:
Chris P. Brophy, James D. Ayres, Donald K. Cohen
Patented Case
View Patent ↗
Granted: Jul 14, 1992
Filed: Jan 29, 1991
Inventors
Chris P. Brophy
James D. Ayres
Donald K. Cohen
Assignee (at issue)
Wyko, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.