IP Library Granted Patent US 5,136,166
Granted Patent Utility
US 5,136,166 · App. 07/648,667

Temperature stable magnetic deflection assembly

Inventor: Lydia J. Young
Patented Case View Patent ↗
Granted: Aug 4, 1992 Filed: Jan 31, 1991
Inventor
Lydia J. Young
Assignee (at issue)
ETEC SYSTEMS, INC.

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Quick Facts
Patent No.
US 5,136,166
App. No.
07/648,667
Filed
1991-01-31
Granted
1992-08-04
Kind
A