Granted Patent
Utility
US 5,136,171 · App. 07/646,361
Charge neutralization apparatus for ion implantation system
Inventors:
Ka-Ngo Leung, Wulf B. Kunkel, Malcom D. Williams, Charles M. McKenna
Patented Case
View Patent ↗
Granted: Aug 4, 1992
Filed: Jan 25, 1991
Inventors
Ka-Ngo Leung
Wulf B. Kunkel
Malcom D. Williams
Charles M. McKenna
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.