IP Library Granted Patent US 5,138,869
Granted Patent Utility
US 5,138,869 · App. 07/628,490

In-line detector system for real-time determination of impurity concentration in a flowing gas stream

Inventor: Glenn M. Tom
Patented Case View Patent ↗
Granted: Aug 18, 1992 Filed: Dec 14, 1990
Inventor
Glenn M. Tom
Assignee (at issue)
Novapure Corporation

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Quick Facts
Patent No.
US 5,138,869
App. No.
07/628,490
Filed
1990-12-14
Granted
1992-08-18
Kind
A