Granted Patent
Utility
US 5,139,918 · App. 07/530,220
Photoresist system and photoetching process employing an I-line peak light source
Inventor:
Atul Goel
Patented Case
View Patent ↗
Granted: Aug 18, 1992
Filed: May 30, 1990
Inventor
Atul Goel
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.