Granted Patent
Utility
US 5,139,922 · App. 07/602,930
Method of making resist pattern
Inventors:
Hisashi Watanabe, Yoshihiro Todokoro, Masazumi Hasegawa, Mitsutoshi Fukuda
Patented Case
View Patent ↗
Granted: Aug 18, 1992
Filed: Oct 25, 1990
Inventors
Hisashi Watanabe
Yoshihiro Todokoro
Masazumi Hasegawa
Mitsutoshi Fukuda
Assignees (at issue)
Matsushita Electronics Corporation
TOSOH CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.