IP Library Granted Patent US 5,139,962
Granted Patent Utility
US 5,139,962 · App. 07/653,312

MOS fabrication method with self-aligned gate

Inventor: Hiroyuki Tanaka
Patented Case View Patent ↗
Granted: Aug 18, 1992 Filed: Feb 11, 1991
Inventor
Hiroyuki Tanaka
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.

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Quick Facts
Patent No.
US 5,139,962
App. No.
07/653,312
Filed
1991-02-11
Granted
1992-08-18
Kind
A