Granted Patent
Utility
US 5,142,120 · App. 07/633,583
Contact cooling of a projection mask
Inventors:
Eric G. Hanson, Si-Ty Lam, William J. West
Patented Case
View Patent ↗
Granted: Aug 25, 1992
Filed: Dec 21, 1990
Inventors
Eric G. Hanson
Si-Ty Lam
William J. West
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.