IP Library › Granted Patent US 5,144,049
Granted Patent Utility
US 5,144,049 · App. 07/781,447

Volatile liquid precursors for the chemical vapor deposition of copper

Inventors: John Anthony Thomas Norman, Beth A. Muratore
Patented Case View Patent ↗
Granted: Sep 1, 1992 Filed: Oct 23, 1991
Inventors
John Anthony Thomas Norman
Beth A. Muratore
Assignee (at issue)
Air Products and Chemicals, Inc.

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Quick Facts
Patent No.
US 5,144,049
App. No.
07/781,447
Filed
1991-10-23
Granted
1992-09-01
Kind
A