Granted Patent
Utility
US 5,146,140 · App. 07/717,137
Method and apparatus to reduce Hg loss in rf capacitively coupled gas discharges
Inventors:
Robert B. Piejak, Valery Godyak, Benjamin Alexandrovich
Patented Case
View Patent ↗
Granted: Sep 8, 1992
Filed: Jun 18, 1991
Inventors
Robert B. Piejak
Valery Godyak
Benjamin Alexandrovich
Assignee (at issue)
GTE Products Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.