Granted Patent
Utility
US 5,147,740 · App. 07/564,996
Structure and process for fabricating conductive patterns having sub-half micron dimensions
Inventor:
Gerald D. Robinson
Patented Case
View Patent ↗
Granted: Sep 15, 1992
Filed: Aug 9, 1990
Inventor
Gerald D. Robinson
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.