IP Library Granted Patent US 5,148,024
Granted Patent Utility
US 5,148,024 · App. 07/676,447

Ion beam processing apparatus and gas gun therefor

Inventor: Chugo Watanabe
Patented Case View Patent ↗
Granted: Sep 15, 1992 Filed: Mar 28, 1991
Inventor
Chugo Watanabe
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 5,148,024
App. No.
07/676,447
Filed
1991-03-28
Granted
1992-09-15
Kind
A