Granted Patent
Utility
US 5,149,158 · App. 07/532,572
Wafer carrier holder for wafer carriers
Inventors:
James S. Molinaro, Eric Stupp
Patented Case
View Patent ↗
Granted: Sep 22, 1992
Filed: Jun 4, 1990
Inventors
James S. Molinaro
Eric Stupp
Assignee (at issue)
Submicron Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.