IP Library › Granted Patent US 5,149,672
Granted Patent Utility
US 5,149,672 · App. 07/754,361

Process for fabricating integrated circuits having shallow junctions

Inventors: Nadia Lifshitz, Ronald J. Schutz
Patented Case View Patent ↗
Granted: Sep 22, 1992 Filed: Aug 29, 1991
Inventors
Nadia Lifshitz
Ronald J. Schutz

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Quick Facts
Patent No.
US 5,149,672
App. No.
07/754,361
Filed
1991-08-29
Granted
1992-09-22
Kind
A