IP Library › Granted Patent US 5,149,673
Granted Patent Utility
US 5,149,673 · App. 07/762,492

Selective chemical vapor deposition of tungsten for microdynamic structures

Inventors: Noel C. MacDonald, Liang-Yuh Chen, Zuoying L. Zhang
Patented Case View Patent ↗
Granted: Sep 22, 1992 Filed: Sep 19, 1991
Inventors
Noel C. MacDonald
Liang-Yuh Chen
Zuoying L. Zhang
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 5,149,673
App. No.
07/762,492
Filed
1991-09-19
Granted
1992-09-22
Kind
A