IP Library Granted Patent US 5,151,340
Granted Patent Utility
US 5,151,340 · App. 07/546,988

Selected photoactive methylolated cyclohexanol compounds and their use in radiation-sensitive mixtures

Inventor: Sobhy Tadros
Patented Case View Patent ↗
Granted: Sep 29, 1992 Filed: Jul 2, 1990
Inventor
Sobhy Tadros
Assignee (at issue)
OCG Microelectronic Materials, Inc.

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Quick Facts
Patent No.
US 5,151,340
App. No.
07/546,988
Filed
1990-07-02
Granted
1992-09-29
Kind
A