Granted Patent
Utility
US 5,152,866 · App. 07/532,144
Plasma/radiation assisted molecular beam epitaxy method
Inventors:
Julius Hyman, Jr., John R. Beattie, Jesse N. Matossian, Owen K. Wu, Juan F. Lam, Lawrence E Anderson
Patented Case
View Patent ↗
Granted: Oct 6, 1992
Filed: May 31, 1990
Inventors
Julius Hyman, Jr.
John R. Beattie
Jesse N. Matossian
Owen K. Wu
Juan F. Lam
Lawrence E Anderson
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.