Granted Patent
Utility
US 5,153,101 · App. 07/537,394
Photoresist
Inventors:
Kurt Meier, Robert J. Lunn, Christoph Kroehnke, Giuliano Eugster
Patented Case
View Patent ↗
Granted: Oct 6, 1992
Filed: Jun 13, 1990
Inventors
Kurt Meier
Robert J. Lunn
Christoph Kroehnke
Giuliano Eugster
Assignee (at issue)
Ciba-Geigy
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.