IP Library Granted Patent US 5,153,440
Granted Patent Utility
US 5,153,440 · App. 07/679,861

Method of stabilizing operation for a liquid metal ion source

Inventor: Anto Yasaka
Patented Case View Patent ↗
Granted: Oct 6, 1992 Filed: Apr 3, 1991
Inventor
Anto Yasaka
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 5,153,440
App. No.
07/679,861
Filed
1991-04-03
Granted
1992-10-06
Kind
A