IP Library Granted Patent US 5,154,943
Granted Patent Utility
US 5,154,943 · App. 07/670,420

Plasma CVD process for coating a dome-shaped substrate

Inventors: Heinz-Werner Etzkorn, Harald Krummel, Volker Paquet, Günter Weidmann
Patented Case View Patent ↗
Granted: Oct 13, 1992 Filed: Mar 18, 1991
Inventors
Heinz-Werner Etzkorn
Harald Krummel
Volker Paquet
Günter Weidmann
Assignee (at issue)
Schott Glaswerke

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Quick Facts
Patent No.
US 5,154,943
App. No.
07/670,420
Filed
1991-03-18
Granted
1992-10-13
Kind
A