Granted Patent
Utility
US 5,155,063 · App. 07/773,420
Method of fabricating semiconductor device including an Al/TiN/Ti contact
Inventor:
Nobukazu Ito
Patented Case
View Patent ↗
Granted: Oct 13, 1992
Filed: Oct 9, 1991
Inventor
Nobukazu Ito
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.