Granted Patent
Utility
US 5,155,368 · App. 07/686,043
Ion beam blanking apparatus and method
Inventors:
David Edwards, Billy W. Ward
Patented Case
View Patent ↗
Granted: Oct 13, 1992
Filed: Apr 16, 1991
Inventors
David Edwards
Billy W. Ward
Assignee (at issue)
Micron Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.