IP Library Granted Patent US 5,156,521
Granted Patent Utility
US 5,156,521 · App. 07/720,750

Method for loading a substrate into a GVD apparatus

Inventors: Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro
Patented Case View Patent ↗
Granted: Oct 20, 1992 Filed: Jun 25, 1991
Inventors
Richard Crabb
McDonald Robinson
Mark Hawkins
Dennis L. Goodwin
Armand P. Ferro
Assignee (at issue)
Epsilon Technology Corporation

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Quick Facts
Patent No.
US 5,156,521
App. No.
07/720,750
Filed
1991-06-25
Granted
1992-10-20
Kind
A