IP Library Granted Patent US 5,157,876
Granted Patent Utility
US 5,157,876 · App. 07/787,154

Stress-free chemo-mechanical polishing agent for II-VI compound semiconductor single crystals and method of polishing

Inventor: Daniel Medellin
Patented Case View Patent ↗
Granted: Oct 27, 1992 Filed: Nov 4, 1991
Inventor
Daniel Medellin
Assignee (at issue)
Rockwell International Corporation

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Quick Facts
Patent No.
US 5,157,876
App. No.
07/787,154
Filed
1991-11-04
Granted
1992-10-27
Kind
A