IP Library Granted Patent US 5,163,712
Granted Patent Utility
US 5,163,712 · App. 07/783,309

Rotatable vacuum flange

Inventors: David Sabo, Steven P. Young
Patented Case View Patent ↗
Granted: Nov 17, 1992 Filed: Oct 28, 1991
Inventors
David Sabo
Steven P. Young
Assignee (at issue)
Varian, Inc.

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Quick Facts
Patent No.
US 5,163,712
App. No.
07/783,309
Filed
1991-10-28
Granted
1992-11-17
Kind
A