Granted Patent
Utility
US 5,166,080 · App. 06/692,578
Techniques for measuring the thickness of a film formed on a substrate
Inventors:
Charles W. Schietinger, Bruce E. Adams
Patented Case
View Patent ↗
Granted: Nov 24, 1992
Filed: Apr 29, 1991
Inventors
Charles W. Schietinger
Bruce E. Adams
Assignee (at issue)
Luxtron Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.