Granted Patent
Utility
US 5,166,530 · App. 07/811,820
Illuminator for microlithographic integrated circuit manufacture
Inventor:
Roger McCleary
Patented Case
View Patent ↗
Granted: Nov 24, 1992
Filed: Dec 20, 1991
Inventor
Roger McCleary
Assignee (at issue)
Federal Signal Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.