Granted Patent
Utility
US 5,169,408 · App. 07/470,871
Apparatus for wafer processing with in situ rinse
Inventors:
Rex L. Biggerstaff, Charles W. Skinner, Daniel J. Syverson, Mark L. Jenson, James G. Kegley
Patented Case
View Patent ↗
Granted: Dec 8, 1992
Filed: Jan 26, 1990
Inventors
Rex L. Biggerstaff
Charles W. Skinner
Daniel J. Syverson
Mark L. Jenson
James G. Kegley
Assignee (at issue)
FSI INTERNATIONAL, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.