Granted Patent
Utility
US 5,172,002 · App. 07/748,460
Optical position sensor for scanning probe microscopes
Inventor:
Daniel Richard Marshall
Patented Case
View Patent ↗
Granted: Dec 15, 1992
Filed: Aug 22, 1991
Inventor
Daniel Richard Marshall
Assignee (at issue)
Wyko, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.