IP Library Granted Patent US 5,173,753
Granted Patent Utility
US 5,173,753 · App. 07/826,674

Inverted coplanar amorphous silicon thin film transistor which provides small contact capacitance and resistance

Inventor: Biing-Seng Wu
Patented Case View Patent ↗
Granted: Dec 22, 1992 Filed: Jan 27, 1992
Inventor
Biing-Seng Wu
Assignee (at issue)
Industrial Technology Research Institute

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Quick Facts
Patent No.
US 5,173,753
App. No.
07/826,674
Filed
1992-01-27
Granted
1992-12-22
Kind
A