Granted Patent
Utility
US 5,175,021 · App. 07/624,320
Transmission line for providing power to an electrode boat in a plasma enhanced chemical vapor deposition system
Inventors:
Michael R. Bonsaver, Rand Conner, David P. Lambert
Patented Case
View Patent ↗
Granted: Dec 29, 1992
Filed: Dec 12, 1990
Inventors
Michael R. Bonsaver
Rand Conner
David P. Lambert
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.